Deformation at the nanometer and micrometer length scales Effects of strain gradients and dislocation starvation

Nanomechanical devices are certain to play an important role in future technologies. Already sensors and actuators based on MEMS technologies are common and new devices based on NEMS are just around the corner. These developments are part of a decade-long trend to build useful engineering devices an...

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Journal Title: Thin Solid Films Vol. 515; no. 6; pp. 3152 - 3157
Authors: Gang Feng, Erica Lilleodden, Julia Greer, William Nix
Format: Article
Language: English
Published: 2007
Subjects:
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