Effects of radiation on substrate temperature in CVD coating reactions
The heat transfer equations governing steady-state temperature equilibrium in a radiant environment have been solved numerically, using a commercially available software package, for a variety of representative situations encountered in low-temperature CVD. Typical numerical solutions are presented,...
|Journal Title:||AICHE Symposium Series pp. 102 - 107|
|Author:||C. Michael Kelly|
|Conference Location:||Houston, TX|
|Conference Dates:||July 24-27, 1988|
|Proceedings Title:||Heat Transfer - Houston 1988: Papers Presented at the 25th National Heat Transfer Conference|
Houston, TX :