Effects of radiation on substrate temperature in CVD coating reactions

The heat transfer equations governing steady-state temperature equilibrium in a radiant environment have been solved numerically, using a commercially available software package, for a variety of representative situations encountered in low-temperature CVD. Typical numerical solutions are presented,...

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Journal Title: AICHE Symposium Series pp. 102 - 107
Author: C. Michael Kelly
Conference Location: Houston, TX
Conference Dates: July 24-27, 1988
Proceedings Title: Heat Transfer - Houston 1988: Papers Presented at the 25th National Heat Transfer Conference
Format: Conference Proceeding
Published: Houston, TX : AIChE, 1988