Effects of radiation on substrate temperature in CVD coating reactions

The heat transfer equations governing steady-state temperature equilibrium in a radiant environment have been solved numerically, using a commercially available software package, for a variety of representative situations encountered in low-temperature CVD. Typical numerical solutions are presented,...

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Journal Title: AICHE Symposium Series pp. 102 - 107
Author: C. Michael Kelly
Conference Location: Houston, TX
Conference Dates: July 24-27, 1988
Proceedings Title: Heat Transfer - Houston 1988: Papers Presented at the 25th National Heat Transfer Conference
Format: Conference Proceeding
Published: Houston, TX : AIChE, 1988
Subjects:
Summary: The heat transfer equations governing steady-state temperature equilibrium in a radiant environment have been solved numerically, using a commercially available software package, for a variety of representative situations encountered in low-temperature CVD. Typical numerical solutions are presented, as well as trends relating the surface temperature profiles to fundamental parameters such as variation in reactor wall temperature, wall and substrate emissivities, radiant interchange view factors and heat of reaction.
ISSN: 0065-8812